Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification
Primary tabs
Reference:
ISO 25164:2026
Publication Year:
2026
Domain:
This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.
This document is also applicable to the deposition of TiN, TiAlN or TiSiN thin films.
26 500 F CFA





















