Analyse chimique des surfaces — Spectrométrie de masse des ions secondaires — Étalonnage de l'échelle de masse pour un spectromètre de masse des ions secondaires à temps de vol

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.