Analyse chimique des surfaces — Microscopie à sonde à balayage — Définition et étalonnage de la résolution latérale d'un microscope optique en champ proche

ISO 27911:2011 describes a method for determining the spatial (lateral) resolution of an apertured near-field scanning optical microscope (NSOM) by imaging an object with a size much smaller than the expected resolution. It is applicable to aperture-type NSOMs operated in the transmission, reflection, collection or illumination/collection mode.