Analyse chimique des surfaces — Spectroscopie des électrons Auger et spectroscopie de photoélectrons — Lignes directrices pour l'utilisation de facteurs expérimentaux de sensibilité relative pour l'analyse quantitative de matériaux homogènes

This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.